Project information
Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings
- Project Identification
- ME 301
- Project Period
- 11/1998 - 11/2002
- Investor / Pogramme / Project type
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Ministry of Education, Youth and Sports of the CR
- Programme KONTAKT (ME+MEB)
- MU Faculty or unit
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Faculty of Science
- prof. RNDr. Jan Janča, DrSc.
- Keywords
- superhard, nanocrystalline, composite, protection coatings, process monitoring, plasma diagnostics, compatible with steel, industrialization, heterostructures
The main objective, the R & D towards the industrialization of the novel superhard coatings requires a broad based investigation into a number of scientific and technical problems which cannot be done sufficiently fast by the SHM Őumperk (finalmanufacturer) alone. The main problem which SHM has to solve regarding the already existing (TiAlSi)N coatings is an improvement of the reproducibility of the fabrication process by means of a development and implementation of the appropriate diagnosticand process control. The second problem involves an improvement in the testing of the coatings which includes the measurement of their hardness, elastic modulus and toughness as a function of annealing temperature, as well as standardized cutting tests.The third mainstream problem will be the development of new nanocomposite systems with better properties than those of the nc-TiN/a-Si3N4 for the coating of machining tools made of cemented carbide and, possibly, even more advanced inserts materials.
Publications
Total number of publications: 26
2001
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Diagnostics and Application of High Frequency Plasma Pencil
Plasma Chemistry and Plasma Processing, year: 2001, volume: 21 (2001), edition: 4
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Diagnostics and monitoring of TiN/AlN deposition process
Year: 2001, type: R&D Presentation
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Improvement of the Efficiency of the Silicon P-I-N cells by Silicon Incorporated Diamond-like Carbon Antireflective Coating
19th International Conference on Amorphous and Microcrystalline Semiconductors, year: 2001
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Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition
Proceedings of 13th Symposium on Application of Plasma Processes, year: 2001
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Optical diagnostics of inductively coupled RF discharge
SAPP 13th Symposium Proceedings, year: 2001
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Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD
JUNIORMAT 01, year: 2001
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Plasma Enhanced CVD of DLC:Si(O) Films from Methane/Hexamethyldisiloxane Feeds
Proceedings of 15th International Symposium on Plasma Chemistry, year: 2001
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Preparation of enhanced CN-based hard coatings by PECVD
Proceedings of 15th International Symposium on Plasma Chemistry, year: 2001
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XPS and Ellipsometric Study of DLC/Silicon Interface
Vacuum, year: 2001, volume: 61, edition: 2-4
2000
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Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge
Diamond and Related Materials, year: 2000, volume: 9, edition: 7