Deposition of nanocomposite CNx/SiO films in inductively coupled r.f. discharge

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Authors

ELIÁŠ Marek ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma JANČA Jan LORENC Michal

Year of publication 2000
Type Article in Periodical
Magazine / Source Diamond and Related Materials
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Carbon; Ellipsometry; Nitrides; Mechanical properties
Description Nanocomposite CNx/SiO thin films
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