Improvement of the Efficiency of the Silicon P-I-N cells by Silicon Incorporated Diamond-like Carbon Antireflective Coating

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Authors	SLÁDEK Petr BURŠÍKOVÁ Vilma SŤAHEL Pavel
Year of publication	2001
Type	Article in Proceedings
Conference	19th International Conference on Amorphous and Microcrystalline Semiconductors
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Diamod-like carbon; antireflective coatings; solar cells
Description	In the present work, the optoelectronical and mechanical properties of the silicon solar cells coated by PECVD with DLC:Si coatings, prepared under different deposition conditions are investigated.
Related projects:	Development and Industrialization of Novel Superhard Nanocrystalline Composite Wear Protective Coatings Plasmachemical depositions and plasmachemical treatment of surfaces of solid state substrate Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates