Modification of Plasma Deposited DLC Films by Hexamethyldisiloxane Addition

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Authors	BURŠÍKOVÁ Vilma ZAJÍČKOVÁ Lenka NAVRÁTIL Vladislav PRYČKOVÁ Jana SUBEDI Deepak Prasad JANČA Jan
Year of publication	2001
Type	Article in Proceedings
Conference	Proceedings of 13th Symposium on Application of Plasma Processes
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Plasma Physics; Thin Solid Films
Description	The modification of some properties of diamond-like carbon thin films by addition of hexametyldisiloxan was studied.Especially mechanical properties (microhardness) were studied.
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