Optical Properties of Si Incorporated Diamond-like Carbon Films Deposited by RF PECVD

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Authors

BRZOBOHATÝ Oto ZAJÍČKOVÁ Lenka BURŠÍKOVÁ Vilma

Year of publication 2001
Type Article in Proceedings
Conference JUNIORMAT 01
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Diamond-like carbon; PECVD; Ellipsometry
Description Silicon incorporated diamond-like films were deposited by 13.56 MHz rf PECVD and the optical properties of the films were examined by the ellipsometric method. Various mixtures of methane and hexamethyldisiloxane (HMDSO) were used as reaction gases for deposition. The dependencies of the refraction and absorption indices on deposition conditions were studied.
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