Project information
Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
- Project Identification
- GA202/07/1669
- Project Period
- 1/2007 - 12/2011
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
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Faculty of Science
- doc. RNDr. Vilma Buršíková, Ph.D.
- Mgr. Oto Brzobohatý, Ph.D.
- doc. Mgr. Pavel Dvořák, Ph.D.
- Mgr. Daniel Franta, Ph.D.
- prof. RNDr. Josef Havel, DrSc.
- prof. RNDr. Jan Janča, DrSc.
- prof. RNDr. Vladislav Navrátil, CSc.
- doc. Mgr. Zdeněk Navrátil, Ph.D.
- prof. RNDr. Ivan Ohlídal, DrSc.
- doc. Mgr. Pavel Sťahel, Ph.D.
- prof. RNDr. David Trunec, CSc.
- doc. Mgr. Lenka Zajíčková, Ph.D.
- Keywords
- PECVD, dual frequency capacitive discharges DF CCP, nanostrukturovaný DLC, termomechanická kapacita
- Cooperating Organization
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Institute of Nuclear Physics
- Responsible person RNDr. Vratislav Peřina, CSc.
- Responsible person Ing. Jaroslav Sobota, CSc.
- Responsible person Mgr. Petr Klapetek, Ph.D.
The aim of the present project is to develop a new deposition system based on application of dual-frequency capacitive plasma (DFCCP) for preparation of themally stable nanostructured diamod-like carbon (NDLC) films. With combination of high frequency excitation (ensuring plasma stability and its high density) and low frequency excitation (controlling the ion energy) we will achieve controlled growth of NDLC films. The objective of the study is to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven and stepped substrate surfaces and significant lowering of the internal stress in films. Complex diagnostics and computer simulation of the DFCCP are planned in order to understand the processes of the film growth. The NDLC films will be exstensively studied from the point of view of their structure (RBS, ERDA, TOF ERDA, HRTEM, SEM etc.) as well as properties (micro- and nanoindentation, elipsometry, spectrophotometry, etc.). Moreover, the thermal stability of NDLC films will be studied using thermal desorption spectroscopy.
Publications
Total number of publications: 70
2008
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Modeling of optical constants of diamond-like carbon
Diamond and Related Materials, year: 2008, volume: 17, edition: 1
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Nanoindentation studies on amorphous carbon films prepared using plasma enchanced chemical vapor deposition
Year: 2008, type: Conference abstract
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Optical characterization of diamond-like carbon thin films non-uniform in thickness using spectroscopic reflectometry
Diamond and Related Materials, year: 2008, volume: 17, edition: 1
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Optimisation of mechanical properties of plasma deposited graded multilayer diamond-like carbon coatings
Journal of Optoelectronics and Advanced Materials, year: 2008, volume: 10/2008, edition: 12
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Optimization of the performance of graded amorphous carbon coatings to steel substrates using PECVD
Year: 2008, type: Conference abstract
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Preparation and characterisation of carbon films prepared from HMDSZ/methane/nitrogen or hydrogen mixture using PECVD
CESPC II - Book of extended abstracts, year: 2008
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Preparation and characterisation of carbon films prepared from HMDSZ/Methane/Nitrogen or Hydrogen mixture using PECVD
Year: 2008, type: Conference abstract
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Relationship between the nanoindentation response of amorphous carbon thin films and the depth profile of their structure
International Balkan Workshop on Applied Physics - Book of abstracts, year: 2008
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Soustava s ultrahydrofobními vlastnostmi, stavební a přírodní zábavný a/nebo relaxační element
Publisher: UPVCR, state: Czech Republic, patent's number: PV 2008-290, year: 2008
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STUDIUL PROPRIETĂŢILOR MECANICE ALE STRATURILOR SUBŢIRI DE CARBON TIP DIMOND-LIKE OBŢINUTE PRIN DIFERITE METODE DE DEPUNERE
SIMPOZIONUL NATIONAL AL TINERILOR CERCETATORI IN DOMENIUL INGINERIEI MATERIALELOR, ROMAT JUNIOR 2008, year: 2008