Project information
Deposition of thermomehanically stable nanostructured diamond-like thin films in dual frequency capacitive discharges
- Project Identification
- GA202/07/1669
- Project Period
- 1/2007 - 12/2011
- Investor / Pogramme / Project type
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Czech Science Foundation
- Standard Projects
- MU Faculty or unit
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Faculty of Science
- doc. RNDr. Vilma Buršíková, Ph.D.
- Mgr. Oto Brzobohatý, Ph.D.
- doc. Mgr. Pavel Dvořák, Ph.D.
- Mgr. Daniel Franta, Ph.D.
- prof. RNDr. Josef Havel, DrSc.
- prof. RNDr. Jan Janča, DrSc.
- prof. RNDr. Vladislav Navrátil, CSc.
- doc. Mgr. Zdeněk Navrátil, Ph.D.
- prof. RNDr. Ivan Ohlídal, DrSc.
- doc. Mgr. Pavel Sťahel, Ph.D.
- prof. RNDr. David Trunec, CSc.
- doc. Mgr. Lenka Zajíčková, Ph.D.
- Keywords
- PECVD, dual frequency capacitive discharges DF CCP, nanostrukturovaný DLC, termomechanická kapacita
- Cooperating Organization
-
Institute of Nuclear Physics
- Responsible person RNDr. Vratislav Peřina, CSc.
- Responsible person Ing. Jaroslav Sobota, CSc.
- Responsible person Mgr. Petr Klapetek, Ph.D.
The aim of the present project is to develop a new deposition system based on application of dual-frequency capacitive plasma (DFCCP) for preparation of themally stable nanostructured diamod-like carbon (NDLC) films. With combination of high frequency excitation (ensuring plasma stability and its high density) and low frequency excitation (controlling the ion energy) we will achieve controlled growth of NDLC films. The objective of the study is to find the optimum combination of the high and low frequency (continuous or pulsed) excitation enabling to cover uneven and stepped substrate surfaces and significant lowering of the internal stress in films. Complex diagnostics and computer simulation of the DFCCP are planned in order to understand the processes of the film growth. The NDLC films will be exstensively studied from the point of view of their structure (RBS, ERDA, TOF ERDA, HRTEM, SEM etc.) as well as properties (micro- and nanoindentation, elipsometry, spectrophotometry, etc.). Moreover, the thermal stability of NDLC films will be studied using thermal desorption spectroscopy.
Publications
Total number of publications: 70
2008
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Study of mechanical properties of graded amorphous carbon coatings prepared using PECVD
2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts, year: 2008
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Study of the Mechanical Properties of Diamond-like Carbon Thin Films Deposited in Single and Dual Frequency Capacitive Discharges
2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts, year: 2008
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Study of thermal stability of Silicon, Oxygen and/or Nitrogen containing Diamon-like Carbon coatings
Year: 2008, type: Conference abstract
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Surface morphology of amorphous hydrocarbon thin films deposited in pulsed radiofrequency discharge
Year: 2008, type: Conference abstract
2007
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Deposition of Diamond-Like Carbon by Gaseous Thermionic Vacuum Arc Method
Year: 2007, type: R&D Presentation
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Lokální mechanické vlastnosti 2007
Year: 2007, type: Conference
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Plasma deposition of doped Diamond-like carbon nano layers. Process modeling and prediction using Artificial Neural Networks
Nanotechnologia analitica, year: 2007
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Preparation and characterisation of nanostructured diamond-like carbon films
Year: 2007, type: Appeared in Conference without Proceedings
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Preparation of protective coatings on polycarbonate from CH4/HMDSZ mixture using PECVD
Juniormat 07, year: 2007
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Studium DLC vrstev na plastových substrátech
VI. ročník konferencie Vrstvy a povlaky 2007, year: 2007