The Torch Discharge Plasma Source for the Surface Treatment Technology
Autoři | |
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Rok publikování | 2000 |
Druh | Článek ve sborníku |
Konference | International Symposium, on High Pressure Low Temperature Plasma Chemistry- HAKONE VII, Greifswald-Germany 2000, Contributed Papers |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | Torch discharge plasma; surface treatmnet |
Popis | The possibility to use of special configuration of the torch discharge burning in mixture of argon and n-hexan for deposition of CH thin films on Al and Cu substrate is reported. |
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