The Torch Discharge Plasma Source for the Surface Treatment Technology

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Authors

KAPIČKA Vratislav ŠÍCHA Miloš KLÍMA Miloš BRABLEC Antonín BIEDERMAN Hynek SLAVINSKÁ D. TRCHOVÁ Miroslava BEHNKE J.F.

Year of publication 2000
Type Article in Proceedings
Conference International Symposium, on High Pressure Low Temperature Plasma Chemistry- HAKONE VII, Greifswald-Germany 2000, Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords Torch discharge plasma; surface treatmnet
Description The possibility to use of special configuration of the torch discharge burning in mixture of argon and n-hexan for deposition of CH thin films on Al and Cu substrate is reported.
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