The Torch Discharge Plasma Source for the Surface Treatment Technology

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Authors	KAPIČKA Vratislav ŠÍCHA Miloš KLÍMA Miloš BRABLEC Antonín BIEDERMAN Hynek SLAVINSKÁ D. TRCHOVÁ Miroslava BEHNKE J.F.
Year of publication	2000
Type	Article in Proceedings
Conference	International Symposium, on High Pressure Low Temperature Plasma Chemistry- HAKONE VII, Greifswald-Germany 2000, Contributed Papers
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	Torch discharge plasma; surface treatmnet
Description	The possibility to use of special configuration of the torch discharge burning in mixture of argon and n-hexan for deposition of CH thin films on Al and Cu substrate is reported.
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates