Structure and mechanical properties of Ni doped nc-TiC/a-C(:H) coatings
| Autoři | |
|---|---|
| Rok publikování | 2015 |
| Druh | Článek ve sborníku |
| Konference | Potential Application of Plasma and Nanomaterials 2015. Book of Contributed Papers |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | https://munispace.muni.cz/index.php/munispace/catalog/book/792 |
| Obor | Fyzika plazmatu a výboje v plynech |
| Klíčová slova | magnetron sputtering; thin coatings; nickel; titanium carbide; nanocomposites; HiPIMS |
| Popis | Nanocomposite nc-TiC/a-C:H thin coatings combine mechanical properties such as high hardness with tribological properties, low friction and wear. In order to specifically design the physical and chemical properties of nc-TiC/a-C:H coatings selective doping with weak-carbide forming element can be used. In this paper we report on preparation and analyses of titanium-carbon coatings doped with a nickel. Hybrid PVD-PECVD process as well as HiPIMS process were used to deposit samples with various titanium, nickel and carbon content. Several sets of samples prepared with different deposition conditions. Chemical composition of the samples as well as structure of the samples and their hardness was analysed and compared. |
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