Structure and mechanical properties of Ni doped nc-TiC/a-C(:H) coatings

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Authors

DANIEL Josef SOUČEK Pavel ZÁBRANSKÝ Lukáš STUPAVSKÁ Monika BERNÁTOVÁ Katarína BURŠÍKOVÁ Vilma VAŠINA Petr

Year of publication 2015
Type Article in Proceedings
Conference Potential Application of Plasma and Nanomaterials 2015. Book of Contributed Papers
MU Faculty or unit

Faculty of Science

Citation
Web https://munispace.muni.cz/index.php/munispace/catalog/book/792
Field Plasma physics
Keywords magnetron sputtering; thin coatings; nickel; titanium carbide; nanocomposites; HiPIMS
Description Nanocomposite nc-TiC/a-C:H thin coatings combine mechanical properties such as high hardness with tribological properties, low friction and wear. In order to specifically design the physical and chemical properties of nc-TiC/a-C:H coatings selective doping with weak-carbide forming element can be used. In this paper we report on preparation and analyses of titanium-carbon coatings doped with a nickel. Hybrid PVD-PECVD process as well as HiPIMS process were used to deposit samples with various titanium, nickel and carbon content. Several sets of samples prepared with different deposition conditions. Chemical composition of the samples as well as structure of the samples and their hardness was analysed and compared.
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