On the implementation of computed laminography using synchrotron radiation

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Authors

HELFEN L. MYAGOTIN A. MIKULÍK Petr PERNOT P. VOROPAEV A. ELYYAN M. DI MICHIEL M. BARUCHEL J. BAUMBACH T.

Year of publication 2011
Type Article in Periodical
Magazine / Source Review of Scientific Instruments
MU Faculty or unit

Faculty of Science

Citation
Web http://rsi.aip.org/resource/1/rsinak/v82/i6/p063702_s1?isAuthorized=no
Field Solid matter physics and magnetism
Keywords x-ray imaging; laminography; synchrotron radiation; radiography; CT
Description Hard x rays from a synchrotron source are used in this implementation of computed laminography for three-dimensional (3D) imaging of flat, laterally extended objects. Due to outstanding properties of synchrotron light, high spatial resolution down to the micrometer scale can be attained, even for specimens having lateral dimensions of several decimeters. Operating either with a monochromatic or with a white synchrotron beam, the method can be optimized to attain high sensitivity or considerable inspection throughput in synchrotron user and small-batch industrial experiments. The article describes the details of experimental setups, alignment procedures, and the underlying reconstruction principles. Imaging of interconnections in flip-chip and wire-bonded devices illustrates the peculiarities of the method compared to its alternatives and demonstrates the wide application potential for the 3D inspection and quality assessment in microsystem technology.
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