Diagnostics of microwave discharge for surface modification

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Authors	HNILICA Jaroslav KUDRLE Vít
Year of publication	2010
Type	Article in Proceedings
Conference	Potential and Applications of Thin Ceramic and Metal Coatings
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	mikrovlnný výboj - surfatron - modifikace povrchů
Description	Microwave plasmas under atmospheric pressure present considerable interest for wide range of applications, such as air pollution control, surface treatment, or plasma synthesis. We use standard industrial surfatron for produce argon microwave plasma under atmospheric pressure. Diagnostics of this plasma under different conditions can help us to choose the best condition for surface modification.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Study of nonequilibrium kinetics of plasmachemical reactions in atmospheric gases at reduced pressure for applications in analytical chemistry Plazmochemické procesy a jejich technologické aplikace