Diagnostics of microwave discharge for surface modification

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Authors

HNILICA Jaroslav KUDRLE Vít

Year of publication 2010
Type Article in Proceedings
Conference Potential and Applications of Thin Ceramic and Metal Coatings
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords mikrovlnný výboj - surfatron - modifikace povrchů
Description Microwave plasmas under atmospheric pressure present considerable interest for wide range of applications, such as air pollution control, surface treatment, or plasma synthesis. We use standard industrial surfatron for produce argon microwave plasma under atmospheric pressure. Diagnostics of this plasma under different conditions can help us to choose the best condition for surface modification.
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