Radial Structure of RF Discharge in Neon

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Authors	NAVRÁTIL Zdeněk TRUNEC David DVOŘÁK Pavel
Year of publication	2008
Type	Article in Proceedings
Conference	2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts
MU Faculty or unit	Faculty of Science
Citation	NAVRÁTIL, Zdeněk, David TRUNEC and Pavel DVOŘÁK. Radial Structure of RF Discharge in Neon. In 2nd Central European Symposium on Plasma Chemistry - Book of Extended Abstracts. Brno: Ústav fyzikální elektroniky (PřF MU), JČM, 2008, p. 77 - 78.
Field	Plasma physics
Keywords	plasma; capacitive; neone; discharge; optical emmision spectroscopy
Description	Radial structure of low-pressure capacitive RF (13.56 MHz) discharge ignited in neon was studied by means of optical emmision spectroscopy.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Deposition of thin films in dielectric barrier discharges at atmospheric pressure