Advanced modeling of reactive sputtering process with non-linear discharge current density

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Authors

SCHMIDTOVÁ Tereza VAŠINA Petr ELIÁŠ Marek

Year of publication 2008
Type Article in Periodical
Magazine / Source Chemické Listy
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords reactive magnetron sputtering
Description Advanced modeling of reactive sputtering process with non-linear discharge current density, paper, interdisciplinary study of plasma physics, magnetron discharges
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