DEPOSITION OF THIN FILMS IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE

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Authors

STUDNIČKA Filip TRUNEC David SŤAHEL Pavel BURŠÍKOVÁ Vilma KELAR Lukáš

Year of publication 2008
Type Article in Periodical
Magazine / Source Chemické Listy, II Central European Symposium on Plasma Chemistry 2008
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords plasma deposition
Description THIN FILMS WERE DEPOSITED IN ATMOSPHERIC PRESSURE GLOW DISCHARGE IN N2 + HMDSO + O2 ATMOSPHERE. THE HARDNESS OF THESE FILMS WAS INCREASED IN COMPARISON WITH FILMS DEPOSITED IN N2 + HMDSO ATMOSPHERE.
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