Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process

Investor logo

Warning

This publication doesn't include Faculty of Sports Studies. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

VAŠINA Petr HYTKOVÁ Tereza ELIÁŠ Marek

Year of publication 2008
Type Article in Proceedings
Conference 19th Europhysics Conference on the Atomic and Molecular Physics of Ionized Gases - Book of Abstracts
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords reactive magnetron sputering; target
Description Modeling of Radial Variation of Target Poisoning During Reactive Sputtering Deposition Process, proceeding, interdisciplinary study of plasma physics
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info