Role of Neutral Gas Temperature on Hysteresis Behaviour of Reactive Sputtering Deposition Process

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Authors

VAŠINA Petr HYTKOVÁ Tereza ELIÁŠ Marek

Year of publication 2008
Type Article in Proceedings
Conference Programme and Abstract Book of 23rd Symposium on Plasma Physics and Technology, Prague, Czech Republic, 16.-19.June 2008
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords hysteresis; reactive sputtering
Description Theoretical study of role of neutral gas temperature on hysteresis behaviour of reactive sputtering deposition process
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