Interdiffusion in SiGe alloys studied by x-rays
| Authors | |
|---|---|
| Year of publication | 2007 |
| Type | Article in Periodical |
| Magazine / Source | Materials Structure in Chemistry, Biology, Physics and Technology |
| MU Faculty or unit | |
| Citation | |
| Field | Solid matter physics and magnetism |
| Keywords | x-ray reflectivity; interdiffusion; SiGe |
| Description | We have investigated SiGe/Si multilayers annealed in-situ at temperatures in the range 780-830 C by x-ray diffraction. From the fits of reflectivity and diffraction we have obtained diffusion coeficients and activation energy for Ge content 50%. |
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