Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films

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Authors	BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel BURŠÍK Jiří
Year of publication	2006
Type	Article in Periodical
Magazine / Source	Journal of Non-Crystalline Solids
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films
Description	In the paper we present a complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films.
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