Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films

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Authors

BURŠÍKOVÁ Vilma SLÁDEK Petr SŤAHEL Pavel BURŠÍK Jiří

Year of publication 2006
Type Article in Periodical
Magazine / Source Journal of Non-Crystalline Solids
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films
Description In the paper we present a complex study of mechanical properties of a-Si : H and a-SiC : H boron doped films.
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