Grazing incidence small-angle x-ray scattering study of self-organized SiGe wires

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Authors

HOLY V. ROCH T. STANGL J. BAUER G.

Year of publication 2001
Type Article in Periodical
Magazine / Source Phys. Rev. B
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords KINETIC GROWTH INSTABILITIES; VICINAL SI(001) SURFACES; STEPPED INTERFACES; GE ISLANDS; MULTILAYERS; DIFFRACTION; SI(113); STRAIN
Description The structure of self-organized quantum wires buried at the interfaces of a SiGe/Si multilayer is investigated by grazing incidence small-angle x-ray scattering. A nearly periodic distribution of wires, well described by a short-range ordering model, gives rise to intensity satellite maxima in reciprocal space. The shape of the wire cross section is determined from the heights of these intensity maxima, and the analysis reveals that the conventional step-bunching model is not sufficient to explain the wire shape.
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