Deposition of hard carbon films and its diagnostics

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Authors	FRGALA Zdeněk KUDRLE Vít JANČA Jan TÁLSKÝ Antonín
Year of publication	2001
Type	Article in Proceedings
Conference	Juniormat'01
MU Faculty or unit	Faculty of Informatics
Citation	FRGALA, Zdeněk, Vít KUDRLE, Jan JANČA and Antonín TÁLSKÝ. Deposition of hard carbon films and its diagnostics. In Juniormat'01. Brno: FSI VUT Brno, 2001, p. 164-165.
Field	Plasma physics
Description	Deposition of hard carbon films and its diagnostics
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