Coplanar and non-coplanar x-ray reflectivity characterization of lateral W/Si multilayer gratings

Investor logo

Warning

This publication doesn't include Faculty of Sports Studies. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

MIKULÍK Petr JERGEL M. BAUMBACH T. MAJKOVÁ E. PINČÍK E. LUBY Š. ORTEGA L. TUCOULOU R. HUDEK P. KOSTIČ I.

Year of publication 2001
Type Article in Periodical
Magazine / Source J. Phys. D: Appl. Phys.
MU Faculty or unit

Faculty of Science

Citation
Web http://www.sci.muni.cz/~mikulik/Publications.html#MikulikJergelBaumbachMPLOTHK-JPD-2001
Field Solid matter physics and magnetism
Keywords reflectivity; xrr; x-uv optics; gratings; w/si; x-ray
Description Structural characterization of a fully etched amorphous W/Si multilayer grating with a lateral periodicity of 800 nm is performed by x-ray reflectivity in the coplanar and non-coplanar modes using a scintillation detector and a two-dimensional gas-filled detector, respectively. Three-dimensional reciprocal space constructions were used to explain the scattering features recorded in both geometries. Coplanar coherent grating truncation rods were fitted by a dynamical theory for rough gratings. Comparison of the reflectivity from the reference planar multilayer completes the study.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info