Deposition of CNx Films in Inductively Coupled RF Discharge

Warning

This publication doesn't include Faculty of Sports Studies. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

ZAJÍČKOVÁ Lenka ELIÁŠ Marek BURŠÍKOVÁ Vilma JANČA Jan LORENC Michal

Year of publication 1999
Type Article in Proceedings
Conference Proceedings of ICPIG XXIV
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Description Deposition of CNx Films in Inductively Coupled RF Discharge
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info