Deposition of CNx Films in Inductively Coupled RF Discharge

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Authors	ZAJÍČKOVÁ Lenka ELIÁŠ Marek BURŠÍKOVÁ Vilma JANČA Jan LORENC Michal
Year of publication	1999
Type	Article in Proceedings
Conference	Proceedings of ICPIG XXIV
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Description	Deposition of CNx Films in Inductively Coupled RF Discharge
Related projects:	Study of plasmachemical reactions in non-isothermic low pressure plasma and its interaction with the surface of solid substrates