Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers

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Authors

GRIM Jan HOLÝ Václav KUBĚNA Josef STANGL J. DARHUBER A.A. ZERLAUTH S. SCHÄFFLER F. BAUER G.

Year of publication 1999
Type Article in Periodical
Magazine / Source Semicond. Sci. Technol.
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
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