Diffuse x-ray reflectivity of strain-compensated Si/SiGe/SiC multilayers

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Authors	GRIM Jan HOLÝ Václav KUBĚNA Josef STANGL J. DARHUBER A.A. ZERLAUTH S. SCHÄFFLER F. BAUER G.
Year of publication	1999
Type	Article in Periodical
Magazine / Source	Semicond. Sci. Technol.
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Related projects:	Physical properties of new materials and layered structures