Analysis of thin films with slightly rough boundaries

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Authors

OHLÍDAL Ivan FRANTA Daniel HORA Jaroslav NAVRÁTIL Karel WEBER Jan JANDA Pavel

Year of publication 1998
Type Article in Periodical
Magazine / Source Mikrochim. Acta
MU Faculty or unit

Faculty of Science

Citation
Web http://hydra.physics.muni.cz/~franta/bib/MA15_177.html
Field Solid matter physics and magnetism
Keywords Spectroscopic Ellipsometry; Spectroscopic Reflectometry; Atomic Force Microscopy
Description In this paper presented method is based on a combination of variable angle spectroscopic ellipsometry, spectroscopic reflectometry and atomic force microscopy enabling us to determine the optical parameters and most significant statistical parameters of the rough boundaries characterizing the slightly rough single layers.
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