Preparation of Hard Yet Moderately Ductile Mo2BC Thin Films by Pulsed-DC Magnetron Sputtering

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Authors

DEBNÁROVÁ Stanislava SOUČEK Pavel VAŠINA Petr ZÁBRANSKÝ Lukáš BURŠÍKOVÁ Vilma

Year of publication 2016
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description A thin film deposited on the surface of a tool can substantially influence its durability and performance. The most frequently used coatings in industry are ceramic coatings with great hardness and stiffness. However, these coatings are quite brittle, which can cause the formation and spreading of cracks. To prevent the formation of cracks, the material of the film should exhibit ductile behaviour. The combination of high hardness and moderate ductility has been discovered in the nanolaminate Mo2BC. Mid frequency pulsed-DC magnetron sputtering was used to deposit thin Mo2BC films. This method was chosen, because it is relatively simple and therefore industry-friendly.
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