Temperature Diagnostic of Polycarbonate Samples Treated in RF Capacitive Argon Plasma
Autoři | |
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Rok publikování | 2003 |
Druh | Článek ve sborníku |
Konference | Proceedings XXVI ICPIG, Greifswald |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | plasma diagnostics; plasma surface teratment; polycarbonate; capacitive RF argon plasma |
Popis | polycarbonate samples were treated in low pressure capacitive coupled RF argon plasma. The surface temperature was continuously measured during plasma teratment. The contact angle and surface enrgies were determined in dependence on sample surface temperature. |
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