Optical diagnostics of atmospheric pressure glow discharge in nitrogen with admixture of organosilicon
Autoři | |
---|---|
Rok publikování | 2003 |
Druh | Článek ve sborníku |
Konference | Proceedings of ICPIG XXVI |
Fakulta / Pracoviště MU | |
Citace | |
Obor | Fyzika plazmatu a výboje v plynech |
Klíčová slova | atmospheric pressure glow dicharge; spectroscopy; nitrogen; organosilicon |
Popis | The atmospheric pressure glow discharge in nitrogen with small admixture of different organosilicon compounds such as hexamethyldisilazane and hexamethyldisiloxane was studied by means of emission spectroscopy. The deposited films were studied by means of indentation techniques. |
Související projekty: |