PERSPECTIVE CARBON MATERIALS AS ELECTRON EMITTERS
| Autoři | |
|---|---|
| Rok publikování | 2014 |
| Druh | Článek ve sborníku |
| Konference | NANOCON 2013, 5TH INTERNATIONAL CONFERENCE |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | http://konsys-t.tanger.cz/files/proceedings/14/reports/1956.pdf |
| Klíčová slova | carbon nanotubes; emission properties; thermal chemical vapour deposition; anodic bonding |
| Popis | Carbon materials are good candidates as electron emitters. In this article will be described emission properties of carbon nanotubes prepared by chemical vapour deposition (CVD). The measurement of emission current density flowing through the electrodes was carried out in a vacuum chamber pumped by a turbomolecular pump. The vacuum chamber was equipped with a linear nano-motion drive SmarAct that enables precise changes of the distance between two electrodes inside the vacuum chamber (step width from 50 nm to 1000 nm, sub-nanometer resolution). The measured results were compared with Fowler-Nordheim theory. One of the proposed solutions for usage CNTs as emitters is in a pressure sensor. A method for packaging emission pressure sensor was also invented so the emission could exist outside the laboratory vacuum chamber. The electrodes of the sensor could be bonded using glass frit bonding or anodic bonding technology. |
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