Modeling of the Gas Flow and Plasma Copolymerization of Two Monomers in an Atmospheric Pressure Dielectric Barrier Discharge
| Autoři | |
|---|---|
| Rok publikování | 2016 |
| Druh | Článek ve sborníku |
| Konference | SOCIETY OF VACUUM COATERS 59TH ANNUAL TECHNICAL CONFERENCE PROCEEDINGS, 2016 |
| Fakulta / Pracoviště MU | |
| Citace | |
| www | https://www.sciencedirect.com/science/article/pii/S0257897216310659?via%3Dihub |
| Klíčová slova | Plasma polymerizationAtmospheric pressureDielectric barrier dischargeDeposition modelGas flow model |
| Popis | This contribution is a combined experimental and numerical study of plasma co-polymerization of maleic anhydride and acetylene in an atmospheric pressure dielectric barrier discharge. It combines a three-dimensional model of the gas dynamics in close-to-real geometry with a semi-analytical model of the deposition, which reduces the unknown plasma chemistry into several averaged species. The unknown coefficients of the model are found by correlating it with measurements of film thickness at various deposition conditions. The predictive capabilities of the model are also tested in an independent experiment. |
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