Study of the thermal dependence of mechanical properties, chemical composition and structure of the nanocomposite TiC/a-C:H coatings
| Název česky | Studium termální závislosti mechanických vlastností, chemického složení a struktury nanokompozitních nc-TiC/a-C:H vrstev |
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| Autoři | |
| Rok publikování | 2013 |
| Druh | Konferenční abstrakty |
| Fakulta / Pracoviště MU | |
| Citace | |
| Popis | This work is aimed on the study of thermal stability of n-TiC/a-C:H coatings prepared by unbalanced reactive magnetron sputtering process containing an acetylene as a reactive gas. These coatings show high hardness and elastic modulus together with low wear and low friction coefficient. High speed steel was used as a substrate. The thermal stability of the films was investigated as a function of thermal annealing under UHV conditions up to 700oC using thermal desorption spectroscopy. The films were annealed in the laboratory furnace Classic Clare 4.0. The furnace chamber was evacuated by turbomolecular pump down to minimum pressure of about 10-5 Pa. The studied samples were subjected to heating with constant heating rate. The mass spectrometer Pfeiffer Vacuum Prisma 80 was set in order to follow the evolution of hydrogen and hydrocarbon species in time. The film stability was studied from the mechanical and structural point of view. The mechanical properties like hardness and elastic modulus were studied by depth sensing indentation technique. Using combined RBS, ERDA and XRD measurements some correlations were found between the thermo-mechanical stability on the one hand and the structure and composition on the other hand. Additionally, the scanning electron microscopy was used for further analysis of the surface and structure of these coatings. This research has been supported by GACR contract 205/12/0407 and OP R&DI CZ.1.05/2.1.00/03.0086. |
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