Influence of DLC films on higher harmonic frequencies in capacitive discharges

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Authors	DVOŘÁK Pavel BURŠÍKOVÁ Vilma ŽEMLIČKA Radek HOMOLA Vojtěch
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Influence of creation or destruction of a DLC film on Fourier components of discharge voltage including higher harmonic frequencies is studied. Fourier components react sensitively on the film presence which can be explained as an influence of the coefficient of secondary electron emission on the electron concentration.
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