Characterization of ultrananocrystalline diamond thin films  using low energy scanning electron microscopy

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Authors	ŠPERKA Jiří ZAJÍČKOVÁ Lenka JAŠEK Ondřej DVOŘÁK Pavel MIKMEKOVÁ Šárka SCHÄFER Jan
Year of publication	2011
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	This paper deals with the low energy scanning electron microscopy characterization of ultrananocrystalline diamond films. These films were prepared by plasma enhanced chemical vapor deposition (PECVD) using dual frequency discharge.
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