Mechanical properties of thin films deposited by TVA and G-TVA methods
| Authors | |
|---|---|
| Year of publication | 2011 |
| Type | Article in Periodical |
| Magazine / Source | Chemicke Listy |
| MU Faculty or unit | |
| Citation | |
| Web | http://www.chemicke-listy.cz/common/article-vol_105-issue_14-page_s132.html |
| Field | Plasma physics |
| Keywords | Thermionic Vacuum Arc; Gaseous Thermionic Vacuum Arc; DLC coatings; nanoindentation |
| Description | The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. A large range of materials, even refractory metals were successfully deposited using this technique. In this paper an extension of TVA method from gases (G-TVA) for DLC synthesis is reported. The novelty consists in using a flow of methane, instead of the carbon rod used as anode in the classic TVA method. This expands enor- mously the applicability of the TVA technique for the synthe- sis of thin films from solids to gas precursors. The mechanical properties of the films deposited were investigated. The de- scribed methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon. |
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