SYNTHESIS OF CARBON NANOSTRUCTURES BY PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION AT ATMOSPHERIC PRESSURE

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Authors

JAŠEK Ondřej SYNEK Petr ZAJÍČKOVÁ Lenka ELIÁŠ Marek KUDRLE Vít

Year of publication 2010
Type Article in Periodical
Magazine / Source Journal of Electrical Engineering
MU Faculty or unit

Faculty of Science

Citation
Web web časopisu
Field Plasma physics
Keywords carbon nanostructures; plasma enhanced chemical vapour deposition; atmospheric pressure
Attached files
Description Carbon nanostructures present the leading field in nanotechnology research. A wide range of chemical and physical methods was used for carbon nanostructures synthesis including arc discharges, laser ablation and chemical vapour deposition. Plasma enhanced chemical vapour deposition (PECVD) with its application in modern microelectronics industry became soon target of research in carbon nanostructures synthesis. Selection of the ideal growth process depends on the application. Most of PECVD techniques work at low pressure requiring vacuum systems. However for industrial applications it would be desirable to work at atmospheric pressure. In this article carbon nanostructures synthesis by plasma discharges working at atmospheric pressure will be reviewed.
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