Deposition and analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering

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Authors	SOUČEK Pavel VAŠINA Petr ELIÁŠ Marek BURŠÍKOVÁ Vilma SCHMIDTOVÁ Tereza JÍLEK Mojmír JÍLEK Mojmír jr. SCHÄFER Jan BURŠÍK Jiří
Year of publication	2010
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Deposition and analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering. Analysis of mechanical properties, chemical composition and adhesion.
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