Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

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Authors	SOUČEK Pavel ABDELAZIZ El Mel PIERRE-YVES Tessier ELIÁŠ Marek BURŠÍKOVÁ Vilma VAŠINA Petr
Year of publication	2010
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD. Analyses of mechanical properties, chemical composition and adhesion.
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