Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD

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Authors

SOUČEK Pavel ABDELAZIZ El Mel PIERRE-YVES Tessier ELIÁŠ Marek BURŠÍKOVÁ Vilma VAŠINA Petr

Year of publication 2010
Type Conference abstract
MU Faculty or unit

Faculty of Science

Citation
Description Deposition and characterization of n-TiC/a-C:H coatings prepared by hybrid PVD-PECVD. Analyses of mechanical properties, chemical composition and adhesion.
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