Higher harmonic frequencies in capacitive discharges

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Authors

DVOŘÁK Pavel VAŠINA Petr BURŠÍKOVÁ Vilma ŽEMLIČKA Radek

Year of publication 2010
Type Article in Proceedings
Conference 63rd GEC and 7th ICRP - Conference Proceedings
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords higher harmonic frequencies; electron concentration; plasma
Description Dependence of amplitudes of higher harmonic frequencies on electron concentration.
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