Preparation of self-adhesive nc-TiC/a-C:H coatings
| Authors | |
|---|---|
| Year of publication | 2010 |
| Type | Article in Proceedings |
| Conference | Potential and Applications of Thin Ceramic and Metal Coatings |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | magnetron sputtering; thin film; adhesion; nanocomposite |
| Description | Several micrometers thick nc-TiC/a-C:H films were prepared by sputtering the Ti target in mixture of argon and acetylene gas. Depending on the deposition conditions, the formation of an interlayer between the substrate and the main columnar part of the coating was observed. The presence of this interlayer promotes significantly the adhesion of the coating. |
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