Influence on surface morphology by plasma-surface interaction between Al film and atmospheric pressure DCSBD plasma

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Authors	PRYSIAZHNYI Vadym VAŠINA Petr ČERNÁK Mirko
Year of publication	2010
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	The results gave us additional information about the influence to the aluminium surface driven by DCSBD plasma in air. The effect of plasma treatment on the aluminium surface crucially depends on the time and input plasma power. Generally, the features of the plasma-surface interaction could be presented as follows: i) at first time, DCSBD plasma cleans the aluminium surface from contamination and etchs the native oxide layer which can be clearly seen by decreasing if the size of aluminium grains on AFM images; ii) further increase of the treatment will lead to oxide layer deposition.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Preparation of nano-films and nano-coatings on textiles using plasma surface treatment at atmospheric pressure