Wireless temperature measurement in the hot filament CVD reactor for deposition of carbon nanotubes

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Authors

KOLMAČKA Michal KADLEČÍKOVÁ Magdaléna BREZA Juraj LAZIŠŤAN Filip ZAJÍČKOVÁ Lenka ELIÁŠ Marek JESENÁK Karol PASTORKOVÁ Katarína

Year of publication 2009
Type Article in Periodical
Magazine / Source Journal of Electrical Engineering
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords carbon nanotubes; chemical vapour deposition; isolation amplifier
Description The experimental work deals with measuring the temperature in the hot filament chemical vapour deposition (HF CVD) reactor by a purpose-built electronic circuit. The objective is to optimize the substrate temperature, one of the key technological parameters in the synthesis of carbon nanotubes. The main outcome of the work is the design and construction of a functional thermometer, its precision calibration and improved accuracy of temperature measurement.
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