Suppressed hysteresis behaviour of titanium sputtering in acetylene gas.

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Authors	SCHMIDTOVÁ Tereza VAŠINA Petr
Year of publication	2009
Type	Conference abstract
MU Faculty or unit	Faculty of Science
Citation
Description	This contribution deals with suppressed hysteresis behaviour of titanium sputtering in argon and acetylene mixture.
Related projects:	Study and application of plasma chemical reactions in non-isothermic low temperature plasma and its interaction with solid surface Study of hybrid deposition process and its application for thin film deposition