Vacancies and self-interstitials dynamics in silicon wafers

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Authors	CAHA Ondřej KUBĚNA Josef KUBĚNA Alan MEDUŇA Mojmír
Year of publication	2009
Type	Article in Periodical
Magazine / Source	Solid State Phenomena
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Silicon; vacancies; Interstitials; nucleation
Description	This work deals mainly with the nucleation of vacancies during RTA concerning various cooling rates and initial states.
Related projects:	Physical and chemical properties of advanced materials and structures Nucleation and growth of oxygen precipitates in silicon