Determination of plasma parameters in neon RF discharge by optical emission spectroscopy
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| Year of publication | 2009 |
| Type | Conference abstract |
| MU Faculty or unit | |
| Citation | |
| Description | Electron density and electron temperature was determined in RF (13.56 MHz) discharge in neon. Collisional-radiative model was applied to determine the theoretical spectra of the discharge for specific plasma parameters. These parameters could be then determined from the best fit of the measured and theoretical spectra. Absolute intensity measurement of plasma emission coefficients of 26 neon lines provided the determination of electron density, their relative intensities determined the electron temperature. Both electron temperature and density were measured as a function of RF power. It was found, that with increasing power the electron density increases, but electron temperature decreases. |
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