Determination of electron density in RF discharge in neon by emission spectroscopy complemented with C-R model and PIC/MC simulation

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Authors

NAVRÁTIL Zdeněk BRZOBOHATÝ Oto TRUNEC David

Year of publication 2009
Type Article in Proceedings
Conference Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords neon; RF discharge; electron density; c-r model; optical spectroscopy
Description The aim of this work was to determine the electron density in the RF discharge in neon from the absolute intensity measurement of neon spectra. The measured optical emission spectra were compared with the spectra calculated by the collisional-radiative model. The electron distribution function, needed for these calculations, was determined from 1D Particle-in-Cell/Monte Carlo model. The electron density was determined with spatial resolution over the discharge gap, reaching peak value of about 1.7 x 10^10 cm-3 in the middle.
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