Determination of electron density in RF discharge in neon by emission spectroscopy complemented with C-R model and PIC/MC simulation
| Authors | |
|---|---|
| Year of publication | 2009 |
| Type | Article in Proceedings |
| Conference | Book of Abstracts, Frontiers in Low Temperature Plasma Diagnostics 8 |
| MU Faculty or unit | |
| Citation | |
| Field | Plasma physics |
| Keywords | neon; RF discharge; electron density; c-r model; optical spectroscopy |
| Description | The aim of this work was to determine the electron density in the RF discharge in neon from the absolute intensity measurement of neon spectra. The measured optical emission spectra were compared with the spectra calculated by the collisional-radiative model. The electron distribution function, needed for these calculations, was determined from 1D Particle-in-Cell/Monte Carlo model. The electron density was determined with spatial resolution over the discharge gap, reaching peak value of about 1.7 x 10^10 cm-3 in the middle. |
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