Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process

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Authors

VAŠINA Petr DVOŘÁK Pavel

Year of publication 2009
Type Article in Proceedings
Conference Book of Contributed Papers of 17th Symposium on Applications of Plasma Processes
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords reactive sputtering
Description Higher harmonic frequencies of discharge voltages as extremely sensitive marker of state of RF reactive sputtering deposition process, proceeding
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