Modeling of reactive sputtering process with non-linear discharge current density

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Authors

SCHMIDTOVÁ Tereza VAŠINA Petr

Year of publication 2008
Type Article in Proceedings
Conference Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry
MU Faculty or unit

Faculty of Science

Citation
Field Plasma physics
Keywords reactive magnetron sputering; target; discharge current density; racetrack
Description Modeling of reactive sputtering process with non-linear discharge current density, proceeding
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