Modeling of reactive sputtering process with non-linear discharge current density

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Authors	SCHMIDTOVÁ Tereza VAŠINA Petr
Year of publication	2008
Type	Article in Proceedings
Conference	Book of Extended Abstracts of 2nd Central European Symposium on Plasma Chemistry
MU Faculty or unit	Faculty of Science
Citation
Field	Plasma physics
Keywords	reactive magnetron sputering; target; discharge current density; racetrack
Description	Modeling of reactive sputtering process with non-linear discharge current density, proceeding
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