Scanning probe microscopy analysis of delaminated thin films

Investor logo

Warning

This publication doesn't include Faculty of Sports Studies. It includes Faculty of Science. Official publication website can be found on muni.cz.
Authors

KLAPETEK Petr BURŠÍKOVÁ Vilma VALTR Miroslav

Year of publication 2007
Type Article in Periodical
Magazine / Source Journal of Physics: Conference Series
MU Faculty or unit

Faculty of Science

Citation
Field Solid matter physics and magnetism
Keywords Scanning probe microscopy; delaminatio; thin films
Description In this article the results of atomic force microscopy (AFM) and scaning thermal microscopy (SThM) of delaminated thin films are presented. It is shown that SThM data can be used for a very precise localisation of the delaminated areas that is necessary for the analysis of film material properties. Moreover, by using AFM it is also possible to characterize morphology of the blister upper boundary with a high resolution too. The quantitative results obtained by the above mentioned methods are compared with nanoindentation measurements.
Related projects:

You are running an old browser version. We recommend updating your browser to its latest version.

More info