Scanning probe microscopy analysis of delaminated thin films

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Authors	KLAPETEK Petr BURŠÍKOVÁ Vilma VALTR Miroslav
Year of publication	2007
Type	Article in Periodical
Magazine / Source	Journal of Physics: Conference Series
MU Faculty or unit	Faculty of Science
Citation
Field	Solid matter physics and magnetism
Keywords	Scanning probe microscopy; delaminatio; thin films
Description	In this article the results of atomic force microscopy (AFM) and scaning thermal microscopy (SThM) of delaminated thin films are presented. It is shown that SThM data can be used for a very precise localisation of the delaminated areas that is necessary for the analysis of film material properties. Moreover, by using AFM it is also possible to characterize morphology of the blister upper boundary with a high resolution too. The quantitative results obtained by the above mentioned methods are compared with nanoindentation measurements.
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