Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode

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Authors

VLADOIU R. MUSA G. CIUPINA V. BURŠÍKOVÁ Vilma BLÁHOVÁ Olga

Year of publication 2007
Type Article in Proceedings
Conference 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD
MU Faculty or unit

Faculty of Science

Citation VLADOIU, R., G. MUSA, V. CIUPINA, Vilma BURŠÍKOVÁ and Olga BLÁHOVÁ. Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode. In 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD. Kyoto, Japan: Kyoto University, 2007, p. 1-4. ISBN 978-9903773-2-8.
Field Plasma physics
Keywords TVA;tungsten;mechanical properties
Description Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode
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