Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode
Authors | |
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Year of publication | 2007 |
Type | Article in Proceedings |
Conference | 18th International Symposium on Plasma Chemistry, Abstracts and Full-Papers CD |
MU Faculty or unit | |
Citation | |
Field | Plasma physics |
Keywords | TVA;tungsten;mechanical properties |
Description | Investigation of the mechanical properties of the thin tungsten films deposited by Thermionic Vacuum Arc (TVA) methode |
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